Semiconductor Manufacturing
Ultra-clean bearings for the most demanding fab environments
Application Overview
Semiconductor manufacturing requires the most stringent bearing specifications in any industry. Wafer handling robots, lithography stages, inspection equipment, and ion implant systems demand ultra-clean, non-magnetic, vacuum-compatible bearings with zero contamination. SKDIN supplies ceramic and stainless steel bearings specifically engineered for ISO Class 1-5 cleanroom environments.
Key Engineering Challenges
- Zero particle generation in ISO Class 1 cleanrooms
- Non-magnetic requirements for electron beam equipment
- Vacuum compatibility down to 10⁻⁸ Torr
- Chemical resistance to aggressive process gases
- Extreme positioning accuracy for lithography stages
SKDIN Solutions
Full Ceramic Bearings
Miniature BearingsAll-ceramic (Si₃N₄) bearings for zero metallic contamination in wafer handling and ion implant applications.
Non-magnetic Stainless Steel
Miniature Bearings316L stainless steel bearings for electron beam and ion beam equipment where magnetic fields cause interference.
Vacuum-Grade Lubrication
Thin-section BearingsPFPE grease or dry-film coatings for ultra-high vacuum compatibility without outgassing.
EUV Lithography Stage
Developed custom full-ceramic thin-section bearings for EUV scanner reticle stage. Met 1nm positioning repeatability and 10⁻⁹ Torr vacuum compatibility requirements.